Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon

Yukihiko Yamagata; Yuji Kozai; Fumiaki Mitsugi; Tomoaki Ikegami; Kenji Ebihara; Ajay Sharma; Robert M. Mayo; Jagdish Narayan

doi:10.1557/PROC-617-J3.4

Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon

Yukihiko Yamagata, Yuji Kozai, Fumiaki Mitsugi, Tomoaki Ikegami, Kenji Ebihara, Ajay Sharma, Robert M. Mayo, Jagdish Narayan

Research output: Contribution to journal › Article › peer-review

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Abstract

Dynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C₂ molecule (Swan band, d ³∏_g - a ³∏_u) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C₂ molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm². It is conjectured that some of C₂ molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.

Original language	English
Pages (from-to)	J341-J346
Journal	Materials Research Society Symposium - Proceedings
Volume	617
DOIs	https://doi.org/10.1557/PROC-617-J3.4
Publication status	Published - 2000
Externally published	Yes

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/PROC-617-J3.4

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title = "Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon",

abstract = "Dynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C2 molecule (Swan band, d 3∏g - a 3∏u) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C2 molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that some of C2 molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.",

author = "Yukihiko Yamagata and Yuji Kozai and Fumiaki Mitsugi and Tomoaki Ikegami and Kenji Ebihara and Ajay Sharma and Mayo, {Robert M.} and Jagdish Narayan",

year = "2000",

doi = "10.1557/PROC-617-J3.4",

language = "English",

volume = "617",

pages = "J341--J346",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

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TY - JOUR

T1 - Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon

AU - Yamagata, Yukihiko

AU - Kozai, Yuji

AU - Mitsugi, Fumiaki

AU - Ikegami, Tomoaki

AU - Ebihara, Kenji

AU - Sharma, Ajay

AU - Mayo, Robert M.

AU - Narayan, Jagdish

PY - 2000

Y1 - 2000

N2 - Dynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C2 molecule (Swan band, d 3∏g - a 3∏u) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C2 molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that some of C2 molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.

AB - Dynamics of carbon ablation plasma plume during the preparation of diamond-like carbon films by KrF excimer pulsed laser deposition was investigated using laser induced fluorescence (LIF) and optical emission spectroscopy. LIF signal from C2 molecule (Swan band, d 3∏g - a 3∏u) was detected using a photomultiplier tube and an intensified CCD camera. Temporal evolution and spatial distribution of C2 molecules in the ablated plume were measured as a function of laser energy density and ablation area. LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that some of C2 molecules are dissociated by collision with energetic species in central part of the ablation plume. Dynamics of ablation plasma plume is strongly dependent on the size of ablated area.

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DO - 10.1557/PROC-617-J3.4

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SP - J341-J346

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Laser induced fluorescence measurement of plasma plume during pulsed laser deposition of diamond-like carbon

Abstract

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