Laser-induced damage of optical coatings grown with surface chemical reaction

Shin ichi Zaitsu; Shinji Motokoshi; Takahisa Jitsuno; Tatsuhiko Yamanaka

doi:10.1117/12.354234

Laser-induced damage of optical coatings grown with surface chemical reaction

Shin ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka

Research output: Contribution to journal › Conference article › peer-review

8 Citations (Scopus)

Abstract

We prepared optical thin films grown with surface chemical reactions using TiCl₄ and H₂O for TiO₂, Al(CH₃)₃ and H₂O₂ for Al₂O₃ as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO₂Al₂O₃ anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

Original language	English
Pages (from-to)	204-211
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3492
Issue number	I
DOIs	https://doi.org/10.1117/12.354234
Publication status	Published - 1999
Externally published	Yes
Event	Proceedings of the 1998 3rd International Conference on Solid State Lasers for Application to Inertial Confinement Fusion - Monterey, CA, USA Duration: Jun 7 1998 → Jun 12 1998

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.354234

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title = "Laser-induced damage of optical coatings grown with surface chemical reaction",

abstract = "We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.",

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T1 - Laser-induced damage of optical coatings grown with surface chemical reaction

AU - Zaitsu, Shin ichi

AU - Motokoshi, Shinji

AU - Jitsuno, Takahisa

AU - Yamanaka, Tatsuhiko

PY - 1999

Y1 - 1999

N2 - We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

AB - We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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Y2 - 7 June 1998 through 12 June 1998

ER -

Laser-induced damage of optical coatings grown with surface chemical reaction

Abstract

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