Laser-induced damage of optical coatings grown with surface chemical reaction

Shin ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka

Research output: Contribution to journalConference articlepeer-review

8 Citations (Scopus)


We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

Original languageEnglish
Pages (from-to)204-211
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue numberI
Publication statusPublished - 1999
Externally publishedYes
EventProceedings of the 1998 3rd International Conference on Solid State Lasers for Application to Inertial Confinement Fusion - Monterey, CA, USA
Duration: Jun 7 1998Jun 12 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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