TY - GEN
T1 - Laser-imaging of laser-produced tin plume behavior for EUV light source
AU - Nakamura, Daisuke
AU - Hashimoto, Yuki
AU - Tamaru, Koji
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
PY - 2007
Y1 - 2007
N2 - Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.
AB - Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.
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M3 - Conference contribution
AN - SCOPUS:84899047169
SN - 1424411742
SN - 9781424411740
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PB - Optical Society of America
T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
Y2 - 26 August 2007 through 26 August 2007
ER -