Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura; Yuki Hashimoto; Koji Tamaru; Akihiko Takahashi; Tatsuo Okada

doi:10.1109/CLEOPR.2007.4391455

Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

Original language	English
Title of host publication	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs	https://doi.org/10.1109/CLEOPR.2007.4391455
Publication status	Published - 2007
Event	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of Duration: Aug 26 2007 → Aug 31 2007

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
Country/Territory	Korea, Republic of
City	Seoul
Period	8/26/07 → 8/31/07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2007.4391455

Cite this

Laser-imaging of laser-produced tin plume behavior for EUV light source. / Nakamura, Daisuke; Hashimoto, Yuki; Tamaru, Koji et al.
2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. 4391455 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakamura, D, Hashimoto, Y, Tamaru, K, Takahashi, A & Okada, T 2007, Laser-imaging of laser-produced tin plume behavior for EUV light source. in 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM., 4391455, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM, Seoul, Korea, Republic of, 8/26/07. https://doi.org/10.1109/CLEOPR.2007.4391455

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abstract = "Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.",

author = "Daisuke Nakamura and Yuki Hashimoto and Koji Tamaru and Akihiko Takahashi and Tatsuo Okada",

year = "2007",

doi = "10.1109/CLEOPR.2007.4391455",

language = "English",

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series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

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note = "2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM ; Conference date: 26-08-2007 Through 31-08-2007",

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AU - Okada, Tatsuo

PY - 2007

Y1 - 2007

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AB - Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM

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Y2 - 26 August 2007 through 31 August 2007

ER -

Laser-imaging of laser-produced tin plume behavior for EUV light source

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All Science Journal Classification (ASJC) codes

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