Laser damage properties of optical coatings with nanoscale layers grown by atomic layer deposition

Sbin Ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Masahiro Nakatsuka, Tatsuhiko Yamanaka

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.

Original languageEnglish
Pages (from-to)1034-1035
Number of pages2
JournalJapanese Journal of Applied Physics
Volume43
Issue number3
DOIs
Publication statusPublished - Mar 2004

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

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