The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.
All Science Journal Classification (ASJC) codes
- General Engineering
- General Physics and Astronomy