TY - JOUR
T1 - Kinetic-thermodynamic model for carbon incorporation during step-flow growth of GaN by metalorganic vapor phase epitaxy
AU - Inatomi, Y.
AU - Kangawa, Y.
AU - Pimpinelli, A.
AU - Einstein, T. L.
N1 - Funding Information:
This work was partially supported by the JSPS KAKENHI Grant No. JP16H06418, MEXT GaN R&D Project, and JST CREST (Grant No. JPMJCR16N2).
Publisher Copyright:
© 2019 American Physical Society.
PY - 2019/1/2
Y1 - 2019/1/2
N2 - Relationships between concentration of unintentionally doped carbon in GaN and its metalorganic vapor phase epitaxy conditions were investigated theoretically. A kinetic-thermodynamic model which considers kinetic behavior of adsorbed atoms on vicinal surface was proposed. Thermodynamic properties of gas species and adsorption energies obtained by first-principles calculation were used in the model. The predicted carbon concentration range, 1015∼1017cm-3, agreed with that of experimental results quantitatively. The calculation results also reproduced experimental tendency: Carbon concentration decreases with increase of NH3 partial pressure and total pressure and/or decrease of trimethylgallium partial pressure.
AB - Relationships between concentration of unintentionally doped carbon in GaN and its metalorganic vapor phase epitaxy conditions were investigated theoretically. A kinetic-thermodynamic model which considers kinetic behavior of adsorbed atoms on vicinal surface was proposed. Thermodynamic properties of gas species and adsorption energies obtained by first-principles calculation were used in the model. The predicted carbon concentration range, 1015∼1017cm-3, agreed with that of experimental results quantitatively. The calculation results also reproduced experimental tendency: Carbon concentration decreases with increase of NH3 partial pressure and total pressure and/or decrease of trimethylgallium partial pressure.
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U2 - 10.1103/PhysRevMaterials.3.013401
DO - 10.1103/PhysRevMaterials.3.013401
M3 - Article
AN - SCOPUS:85060628265
SN - 2475-9953
VL - 3
JO - Physical Review Materials
JF - Physical Review Materials
IS - 1
M1 - 013401
ER -