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Investigation of plasma parameters in a VHF plasma with narrow gap under high gaseous pressure
Hiroshi Muta, Shinichi Kishida, Masayoshi Tanaka, Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Yoshinobu Kawai
Research output: Contribution to journal › Article › peer-review
3
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(Scopus)