Integrated microlaser displacement sensor

Renshi Sawada; Eiji Higurashi; Takahiro Ito

doi:10.1088/0960-1317/12/3/314

Integrated microlaser displacement sensor

Renshi Sawada, Eiji Higurashi, Takahiro Ito

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

A new integrated optical microlaser displacement sensor that includes a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. The sensor can measure the relative distance travelled against an outside reflective mirror. The measurement resolution is expected to be of the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed because its inertia is extremely small and can be incorporated into a microstage and microsystem.

Original language	English
Pages (from-to)	286-290
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	12
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/12/3/314
Publication status	Published - May 1 2002

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/12/3/314

Cite this

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AB - A new integrated optical microlaser displacement sensor that includes a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. The sensor can measure the relative distance travelled against an outside reflective mirror. The measurement resolution is expected to be of the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed because its inertia is extremely small and can be incorporated into a microstage and microsystem.

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Integrated microlaser displacement sensor

Abstract

All Science Journal Classification (ASJC) codes

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