Integrated microlaser displacement sensor

Renshi Sawada, Eiji Higurashi, Takahiro Ito

    Research output: Contribution to journalArticlepeer-review

    7 Citations (Scopus)


    A new integrated optical microlaser displacement sensor that includes a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. The sensor can measure the relative distance travelled against an outside reflective mirror. The measurement resolution is expected to be of the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed because its inertia is extremely small and can be incorporated into a microstage and microsystem.

    Original languageEnglish
    Pages (from-to)286-290
    Number of pages5
    JournalJournal of Micromechanics and Microengineering
    Issue number3
    Publication statusPublished - May 1 2002

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Mechanics of Materials
    • Mechanical Engineering
    • Electrical and Electronic Engineering


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