Integrated micro-displacement sensor that uses beam divergence

Takahiro Ito, Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


An integrated optical micro-displacement sensor that uses a divergent laser beam has been developed. The sensor can measure the distance to an external reflective mirror. The measurement resolution is as high as 0.01 μm. The laser diode, photodiodes and optical waveguide are monolithically integrated on a GaAs substrate. This integration eliminates the difficult optical alignment and makes the sensor extremely small. The sensor is only 0.8 × 0.75 mm2, and can therefore be directly attached at the place where the displacement is to be measured.

Original languageEnglish
Pages (from-to)942-947
Number of pages6
JournalJournal of Micromechanics and Microengineering
Issue number6
Publication statusPublished - Nov 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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