Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

R. Sawada; E. Higurashi; S. Sanada; D. Chino; I. Ishikawa

doi:10.1109/omems.2006.1708260

Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

R. Sawada, E. Higurashi, S. Sanada, D. Chino, I. Ishikawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Publisher	IEEE Computer Society
Pages	52-53
Number of pages	2
ISBN (Print)	078039562X, 9780780395626
DOIs	https://doi.org/10.1109/omems.2006.1708260
Publication status	Published - 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: Aug 21 2006 → Aug 24 2006

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

Other	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	8/21/06 → 8/24/06

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1109/omems.2006.1708260

Cite this

Sawada, R., Higurashi, E., Sanada, S., Chino, D., & Ishikawa, I. (2006). Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 52-53). Article 1708260 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). IEEE Computer Society. https://doi.org/10.1109/omems.2006.1708260

Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. / Sawada, R.; Higurashi, E.; Sanada, S. et al.
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society, 2006. p. 52-53 1708260 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sawada, R, Higurashi, E, Sanada, S, Chino, D & Ishikawa, I 2006, Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708260, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, IEEE Computer Society, pp. 52-53, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 8/21/06. https://doi.org/10.1109/omems.2006.1708260

Sawada R, Higurashi E, Sanada S, Chino D, Ishikawa I. Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society. 2006. p. 52-53. 1708260. (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). doi: 10.1109/omems.2006.1708260

Sawada, R. ; Higurashi, E. ; Sanada, S. et al. / Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society, 2006. pp. 52-53 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

@inproceedings{bf931fd083c44887b125a3621a1ee6d8,

title = "Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror",

abstract = "An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.",

author = "R. Sawada and E. Higurashi and S. Sanada and D. Chino and I. Ishikawa",

year = "2006",

doi = "10.1109/omems.2006.1708260",

language = "English",

isbn = "078039562X",

series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

publisher = "IEEE Computer Society",

pages = "52--53",

booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",

}

TY - GEN

T1 - Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

AU - Sawada, R.

AU - Higurashi, E.

AU - Sanada, S.

AU - Chino, D.

AU - Ishikawa, I.

PY - 2006

Y1 - 2006

N2 - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

AB - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

UR - http://www.scopus.com/inward/record.url?scp=41549087111&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=41549087111&partnerID=8YFLogxK

U2 - 10.1109/omems.2006.1708260

DO - 10.1109/omems.2006.1708260

M3 - Conference contribution

AN - SCOPUS:41549087111

SN - 078039562X

SN - 9780780395626

T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

SP - 52

EP - 53

BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

PB - IEEE Computer Society

T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Y2 - 21 August 2006 through 24 August 2006

ER -

Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this