Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Renshi Sawada; Eiji Higurashi; Takahiro Itoh; Mieko Tsubamoto

Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Renshi Sawada, Eiji Higurashi, Takahiro Itoh, Mieko Tsubamoto

Research output: Contribution to journal › Conference article › peer-review

Abstract

An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.

Original language	English
Pages (from-to)	47-48
Number of pages	2
Journal	LEOS Summer Topical Meeting
Publication status	Published - 1998
Externally published	Yes
Event	Proceedings of the 1998 IEEE/LEOS Summer Topical Meeting - Monterey, CA, USA Duration: Jul 20 1998 → Jul 24 1998

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Cite this

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abstract = "An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.",

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AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Itoh, Takahiro

AU - Tsubamoto, Mieko

PY - 1998

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N2 - An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.

AB - An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.

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AN - SCOPUS:0031625625

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Y2 - 20 July 1998 through 24 July 1998

ER -

Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Abstract

All Science Journal Classification (ASJC) codes

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