TY - GEN
T1 - Integrated blood flowmeter using micromachining technology
AU - Omori, Yukie
AU - Sawada, Renshi
AU - Sakano, Susumu
PY - 2014/1/1
Y1 - 2014/1/1
N2 - The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.
AB - The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.
UR - http://www.scopus.com/inward/record.url?scp=84910647163&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84910647163&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84910647163
T3 - 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
SP - 447
EP - 452
BT - 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
PB - IMEKO-International Measurement Federation Secretariat
T2 - 13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
Y2 - 29 September 2004 through 1 October 2004
ER -