TY - JOUR
T1 - In-situ measurement of CO gas concentration in a Czochralski furnace of silicon crystals
AU - Miyamura, Y.
AU - Harada, H.
AU - Liu, X.
AU - Nakano, S.
AU - Nishizawa, S.
AU - Kakimoto, K.
N1 - Funding Information:
This work is based on results obtained from a project supported by the New Energy and Industrial Technology Development Organization ( NEDO ).
Publisher Copyright:
© 2018 Elsevier B.V.
PY - 2019/2/1
Y1 - 2019/2/1
N2 - Power devices with high-performance require long carrier lifetimes within their silicon crystals. This paper reports the in-situ measurement of carbon monoxide in a Czochralski growth furnace of silicon single crystals. Moreover, this paper reports analytical investigation on contamination to silicon melt as functions of pressure in the furnace, argon gas flow velocity and gap width between the melt and a thermal shield. The experimental results show the carbon contamination to the melt increases when the pressure increases and the flow rate decreases. Increase of the gap width increases the contamination of carbon. We could explain the results qualitatively using a simple transport model.
AB - Power devices with high-performance require long carrier lifetimes within their silicon crystals. This paper reports the in-situ measurement of carbon monoxide in a Czochralski growth furnace of silicon single crystals. Moreover, this paper reports analytical investigation on contamination to silicon melt as functions of pressure in the furnace, argon gas flow velocity and gap width between the melt and a thermal shield. The experimental results show the carbon contamination to the melt increases when the pressure increases and the flow rate decreases. Increase of the gap width increases the contamination of carbon. We could explain the results qualitatively using a simple transport model.
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U2 - 10.1016/j.jcrysgro.2018.11.017
DO - 10.1016/j.jcrysgro.2018.11.017
M3 - Article
AN - SCOPUS:85057828914
SN - 0022-0248
VL - 507
SP - 154
EP - 156
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
ER -