Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

Yohei Sutani; Tatsuya Fukushima; Akimitsu Mori; Yasuko Koshiba; Tetsuhiro Kodani; Takashi Kanemura; Kenji Ishida

doi:10.7567/1347-4065/ab5d70

Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

Yohei Sutani
, Tatsuya Fukushima
, Akimitsu Mori
, Yasuko Koshiba
, Tetsuhiro Kodani
, Takashi Kanemura
, Kenji Ishida

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20% (553 → 430 V W^-1) and approximately 100% in the case of the sensor without Parylene C (551 → 0.86 V W^-1). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer, Parylene-C-coated VDF oligomer, and Parylene-C-coated P(VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligomeric pyroelectric sensor.

Original language	English
Article number	SGGG05
Journal	Japanese journal of applied physics
Volume	59
Issue number	SG
DOIs	https://doi.org/10.7567/1347-4065/ab5d70
Publication status	Published - Apr 1 2020
Externally published	Yes

All Science Journal Classification (ASJC) codes

General Engineering
General Physics and Astronomy

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10.7567/1347-4065/ab5d70

Cite this

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title = "Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating",

abstract = "We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20\% (553 → 430 V W-1) and approximately 100\% in the case of the sensor without Parylene C (551 → 0.86 V W-1). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer, Parylene-C-coated VDF oligomer, and Parylene-C-coated P(VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligomeric pyroelectric sensor.",

author = "Yohei Sutani and Tatsuya Fukushima and Akimitsu Mori and Yasuko Koshiba and Tetsuhiro Kodani and Takashi Kanemura and Kenji Ishida",

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T1 - Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

AU - Sutani, Yohei

AU - Fukushima, Tatsuya

AU - Mori, Akimitsu

AU - Koshiba, Yasuko

AU - Kodani, Tetsuhiro

AU - Kanemura, Takashi

AU - Ishida, Kenji

PY - 2020/4/1

Y1 - 2020/4/1

N2 - We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20% (553 → 430 V W-1) and approximately 100% in the case of the sensor without Parylene C (551 → 0.86 V W-1). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer, Parylene-C-coated VDF oligomer, and Parylene-C-coated P(VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligomeric pyroelectric sensor.

AB - We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20% (553 → 430 V W-1) and approximately 100% in the case of the sensor without Parylene C (551 → 0.86 V W-1). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer, Parylene-C-coated VDF oligomer, and Parylene-C-coated P(VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligomeric pyroelectric sensor.

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JO - Japanese journal of applied physics

JF - Japanese journal of applied physics

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Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

Abstract

All Science Journal Classification (ASJC) codes

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