TY - JOUR
T1 - Improvement of superconductive properties of mesoscopic Nb wires by Ti passivation layers
AU - Ohnishi, Kohei
AU - Kimura, Takashi
AU - Otani, Yoshichika
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2008/2
Y1 - 2008/2
N2 - We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.
AB - We have investigated superconductive properties of nano-scale Nb wires fabricated by a simple lift-off process with magnetron sputtering. The superconductive properties of the Nb wires were remarkably improved by employing highly plasma resistant electron-beam resist ZEP520A combined with a thin Ti passivation layer. This optimized fabrication process yielded a 300-nm-wide Nb wire with the same transition temperature as that of the reference Nb film. Thereby, a highly transparent Nb/Cu junction was successfully fabricated.
UR - http://www.scopus.com/inward/record.url?scp=57049141044&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=57049141044&partnerID=8YFLogxK
U2 - 10.1143/APEX.1.021701
DO - 10.1143/APEX.1.021701
M3 - Article
AN - SCOPUS:57049141044
SN - 1882-0778
VL - 1
JO - Applied Physics Express
JF - Applied Physics Express
IS - 2
M1 - 021701
ER -