Improvement of laser trapping based microprobe in laser shaded condition

Masaki Michihata; Yasuhiro Takaya; Terutake Hayashi

doi:10.1299/jamdsm.6.764

Improvement of laser trapping based microprobe in laser shaded condition

Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect.

Original language	English
Pages (from-to)	764-770
Number of pages	7
Journal	Journal of Advanced Mechanical Design, Systems and Manufacturing
Volume	6
Issue number	6
DOIs	https://doi.org/10.1299/jamdsm.6.764
Publication status	Published - 2012
Externally published	Yes

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/jamdsm.6.764

Cite this

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author = "Masaki Michihata and Yasuhiro Takaya and Terutake Hayashi",

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AU - Michihata, Masaki

AU - Takaya, Yasuhiro

AU - Hayashi, Terutake

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AB - A micro-probe based on laser trapping has been proposed for the probe system of a nano-coordinate measuring machine. This study focused on the "shadow effect," which is the case wherein a partial beam for laser trapping is shaded by the specimen. A radially polarized beam was introduced to improve the shadow effect. As the result of increasing the trapping efficiency by 3.2 times, this high-efficient laser trapping made it possible to extend the measurable range of the vertical surface under the shadow effect.

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Improvement of laser trapping based microprobe in laser shaded condition

Abstract

All Science Journal Classification (ASJC) codes

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