TY - GEN
T1 - Improvement of an optical fiber stylus for microstructure and surface roughness measurement
AU - Uchiyama, Kosuke
AU - Murakami, Hiroshi
AU - Katsuki, Akio
AU - Sajima, Takao
AU - Yamamoto, Takahiko
AU - Fujiyoshi, Kunitaka
N1 - Publisher Copyright:
Copyright © Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020. All rights reserved.
PY - 2020
Y1 - 2020
N2 - In recent years, there has been an increasing demand for measuring the inner diameter of a small diameter hole, such as a TSV, having a diameter of 10 μm or less. Therefore, we have been developing a measurement system using an optical fiber as a stylus to measure microstructures with low measurement force. In this study, a method to design and manufacture an improved two-step stylus that has a small shaft diameter, which can be inserted into a small diameter hole or small groove, and a large diameter of the remaining shaft less susceptible to external influences will be discussed. Furthermore, a method to design and manufacture a two-step plus hinge stylus with a hinge that further helps improve the measurement sensitivity of the two-step stylus, in addition an L-shaped stylus that has a pointed tip and bent shaft in the middle is proposed for surface roughness measurement.
AB - In recent years, there has been an increasing demand for measuring the inner diameter of a small diameter hole, such as a TSV, having a diameter of 10 μm or less. Therefore, we have been developing a measurement system using an optical fiber as a stylus to measure microstructures with low measurement force. In this study, a method to design and manufacture an improved two-step stylus that has a small shaft diameter, which can be inserted into a small diameter hole or small groove, and a large diameter of the remaining shaft less susceptible to external influences will be discussed. Furthermore, a method to design and manufacture a two-step plus hinge stylus with a hinge that further helps improve the measurement sensitivity of the two-step stylus, in addition an L-shaped stylus that has a pointed tip and bent shaft in the middle is proposed for surface roughness measurement.
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M3 - Conference contribution
AN - SCOPUS:85091581767
T3 - Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
SP - 313
EP - 316
BT - Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
A2 - Leach, Richard K.
A2 - Billington, David
A2 - Nisbet, C.
A2 - Phillips, D.
PB - euspen
T2 - 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020
Y2 - 8 June 2020 through 12 June 2020
ER -