Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

R. Sawada; J. Yamaguchi; E. Higurashi; A. Shimizu; T. Yamamoto; N. Takeuchi; Y. Uenishi

doi:10.1109/OMEMS.2003.1233512

Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

R. Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

15 Citations (Scopus)

Abstract

This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	153-154
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233512
Publication status	Published - 2003
Externally published	Yes
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: Aug 18 2003 → Aug 21 2003

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	8/18/03 → 8/21/03

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1109/OMEMS.2003.1233512

Cite this

Sawada, R., Yamaguchi, J., Higurashi, E., Shimizu, A., Yamamoto, T., Takeuchi, N., & Uenishi, Y. (2003). Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 153-154). Article 1233512 (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233512

Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. / Sawada, R.; Yamaguchi, J.; Higurashi, E. et al.
2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 153-154 1233512 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sawada, R, Yamaguchi, J, Higurashi, E, Shimizu, A, Yamamoto, T, Takeuchi, N & Uenishi, Y 2003, Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233512, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 153-154, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 8/18/03. https://doi.org/10.1109/OMEMS.2003.1233512

Sawada R, Yamaguchi J, Higurashi E, Shimizu A, Yamamoto T, Takeuchi N et al. Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring. In 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc. 2003. p. 153-154. 1233512. (2003 IEEE/LEOS International Conference on Optical MEMS). doi: 10.1109/OMEMS.2003.1233512

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author = "R. Sawada and J. Yamaguchi and E. Higurashi and A. Shimizu and T. Yamamoto and N. Takeuchi and Y. Uenishi",

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Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Abstract

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All Science Journal Classification (ASJC) codes

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