Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3films deposited by pulsed laser deposition

Fabi Zhang; Congyu Hu; Makoto Arita; Katsuhiko Saito; Tooru Tanaka; Qixin Guo

doi:10.1063/1.5140822

Impacts of oxygen radical ambient on structural and optical properties of (AlGa)₂O₃films deposited by pulsed laser deposition

Fabi Zhang, Congyu Hu, Makoto Arita, Katsuhiko Saito, Tooru Tanaka, Qixin Guo

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process.

Original language	English
Article number	065125
Journal	AIP Advances
Volume	10
Issue number	6
DOIs	https://doi.org/10.1063/1.5140822
Publication status	Published - Jun 1 2020

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.5140822

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title = "Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3films deposited by pulsed laser deposition",

abstract = "We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process.",

author = "Fabi Zhang and Congyu Hu and Makoto Arita and Katsuhiko Saito and Tooru Tanaka and Qixin Guo",

note = "Funding Information: This work was partially supported by the Japan Society for Promotion of Science (JSPS) for providing grants (KAKENHI Grant Nos. 19K04492 and 18K04681) and the Partnership Project for Fundamental Technology Researches of the Ministry of Education, Culture, Sports, Science and Technology, Japan. We would also like to thank Gaofeng Deng, Zewei Chen, and Chengyu Pan for preparing the samples. One of the authors (Fabi Zhang) was sponsored by the Guangxi Scholarship Fund of Guangxi Education Department, Guangxi Science and Technology Base and Talent Special Project (Grant No. AD18281084), and National Natural Science Foundation of China (Grant No. 61764001). Publisher Copyright: {\textcopyright} 2020 Author(s).",

year = "2020",

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doi = "10.1063/1.5140822",

language = "English",

volume = "10",

journal = "AIP Advances",

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T1 - Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3films deposited by pulsed laser deposition

AU - Zhang, Fabi

AU - Hu, Congyu

AU - Arita, Makoto

AU - Saito, Katsuhiko

AU - Tanaka, Tooru

AU - Guo, Qixin

N1 - Funding Information: This work was partially supported by the Japan Society for Promotion of Science (JSPS) for providing grants (KAKENHI Grant Nos. 19K04492 and 18K04681) and the Partnership Project for Fundamental Technology Researches of the Ministry of Education, Culture, Sports, Science and Technology, Japan. We would also like to thank Gaofeng Deng, Zewei Chen, and Chengyu Pan for preparing the samples. One of the authors (Fabi Zhang) was sponsored by the Guangxi Scholarship Fund of Guangxi Education Department, Guangxi Science and Technology Base and Talent Special Project (Grant No. AD18281084), and National Natural Science Foundation of China (Grant No. 61764001). Publisher Copyright: © 2020 Author(s).

PY - 2020/6/1

Y1 - 2020/6/1

N2 - We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process.

AB - We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process.

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Impacts of oxygen radical ambient on structural and optical properties of (AlGa)₂O₃films deposited by pulsed laser deposition

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