Fingerprint
Dive into the research topics of 'Impact of light-element impurities on crystalline defect generation in silicon wafer'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Impact of light-element impurities on crystalline defect generation in silicon wafer
Tomihisa Tachibana, Takashi Sameshima, Takuto Kojima, Koji Arafune, Koichi Kakimoto, Yoshiji Miyamura, Hirofumi Harada, Takashi Sekiguchi, Yoshio Ohshita, Atsushi Ogura
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)