Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita, Shin Ich Yamaura, Hisamichi Kimura, Kunio Yubuta, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

Original languageEnglish
Pages (from-to)225-229
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Issue number5
Publication statusPublished - 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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