Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita; Shin Ich Yamaura; Hisamichi Kimura; Kunio Yubuta; Akihisa Inoue

doi:10.1541/ieejsmas.128.225

Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita, Shin Ich Yamaura, Hisamichi Kimura, Kunio Yubuta, Akihisa Inoue

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

Original language	English
Pages (from-to)	225-229
Number of pages	5
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	128
Issue number	5
DOIs	https://doi.org/10.1541/ieejsmas.128.225
Publication status	Published - 2008
Externally published	Yes

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.128.225

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@article{c8ee955e5cfb4885b96a944b0dc494f7,

title = "Hydrogen sensors using Pd-based metallic glassy alloys",

abstract = "Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.",

author = "Susumu Kajita and Yamaura, {Shin Ich} and Hisamichi Kimura and Kunio Yubuta and Akihisa Inoue",

year = "2008",

doi = "10.1541/ieejsmas.128.225",

language = "English",

volume = "128",

pages = "225--229",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "5",

}

TY - JOUR

T1 - Hydrogen sensors using Pd-based metallic glassy alloys

AU - Kajita, Susumu

AU - Yamaura, Shin Ich

AU - Kimura, Hisamichi

AU - Yubuta, Kunio

AU - Inoue, Akihisa

PY - 2008

Y1 - 2008

N2 - Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

AB - Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

UR - http://www.scopus.com/inward/record.url?scp=73849140150&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=73849140150&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.128.225

DO - 10.1541/ieejsmas.128.225

M3 - Article

AN - SCOPUS:73849140150

SN - 1341-8939

VL - 128

SP - 225

EP - 229

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 5

ER -

Hydrogen sensors using Pd-based metallic glassy alloys

Abstract

All Science Journal Classification (ASJC) codes

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