TY - JOUR
T1 - Hydrogen incorporation in tungsten deposits growing by deuterium plasma sputtering
AU - Katayama, Kazunari
AU - Kasahara, Sanshiro
AU - Ishikawa, Shinichiro
AU - Fukada, Satoshi
AU - Nishikawa, Masabumi
N1 - Funding Information:
This work was supported by a Grant-in Aid for Young Scientists (B) from the Japan Society for the Promotion of Science (KAKENHI 21760691).
PY - 2011/10
Y1 - 2011/10
N2 - Tungsten deposits were produced by sputtering method using hydrogen isotope RF plasma, and the density and the incorporated components in the deposits were investigated. The density changed in the range from 14.2 g/cm3 to 6.1 g/cm3, and hydrogen isotope retention changed in the range from 0.25 to 0.05 as (H + D)/W by the difference of deposition conditions. Both the density and hydrogen isotope retention tended to decrease with an increase of pressure. Even though a deuterium gas was used for producing tungsten deposits, not only deuterium but also hydrogen, oxygen and water vapor were incorporated in the deposits. It is considered that the incorporation of these components originated in water vapor unintentionally existing in the vacuum chamber.
AB - Tungsten deposits were produced by sputtering method using hydrogen isotope RF plasma, and the density and the incorporated components in the deposits were investigated. The density changed in the range from 14.2 g/cm3 to 6.1 g/cm3, and hydrogen isotope retention changed in the range from 0.25 to 0.05 as (H + D)/W by the difference of deposition conditions. Both the density and hydrogen isotope retention tended to decrease with an increase of pressure. Even though a deuterium gas was used for producing tungsten deposits, not only deuterium but also hydrogen, oxygen and water vapor were incorporated in the deposits. It is considered that the incorporation of these components originated in water vapor unintentionally existing in the vacuum chamber.
UR - http://www.scopus.com/inward/record.url?scp=80054013681&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80054013681&partnerID=8YFLogxK
U2 - 10.1016/j.fusengdes.2011.04.032
DO - 10.1016/j.fusengdes.2011.04.032
M3 - Article
AN - SCOPUS:80054013681
SN - 0920-3796
VL - 86
SP - 1702
EP - 1705
JO - Fusion Engineering and Design
JF - Fusion Engineering and Design
IS - 9-11
ER -