Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

Masaaki Ishino; Shiyoshi Yokoyama

doi:10.1109/MOC.2015.7416476

Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

Masaaki Ishino, Shiyoshi Yokoyama

Department of Advanced Device Materials

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

Original language	English
Title of host publication	MOC 2015 - Technical Digest of 20th Microoptics Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9784863485433
DOIs	https://doi.org/10.1109/MOC.2015.7416476
Publication status	Published - Feb 23 2016
Event	20th Microoptics Conference, MOC 2015 - Fukuoka, Japan Duration: Oct 25 2015 → Oct 28 2015

Publication series

Name	MOC 2015 - Technical Digest of 20th Microoptics Conference

Other

Other	20th Microoptics Conference, MOC 2015
Country/Territory	Japan
City	Fukuoka
Period	10/25/15 → 10/28/15

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

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10.1109/MOC.2015.7416476

Cite this

Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. / Ishino, Masaaki; Yokoyama, Shiyoshi.
MOC 2015 - Technical Digest of 20th Microoptics Conference. Institute of Electrical and Electronics Engineers Inc., 2016. 7416476 (MOC 2015 - Technical Digest of 20th Microoptics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ishino, M & Yokoyama, S 2016, Hybrid thin silicon nitride and electro-optic polymer waveguide modulators. in MOC 2015 - Technical Digest of 20th Microoptics Conference., 7416476, MOC 2015 - Technical Digest of 20th Microoptics Conference, Institute of Electrical and Electronics Engineers Inc., 20th Microoptics Conference, MOC 2015, Fukuoka, Japan, 10/25/15. https://doi.org/10.1109/MOC.2015.7416476

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abstract = "Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.",

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doi = "10.1109/MOC.2015.7416476",

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N2 - Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

AB - Compact and, low driving voltage optical modulators are key device for high-speed on-chip optical interconnects. We have fabricated a hybrid silicon nitride and electro-optic (EO) polymer modulator and demonstrated its EO properties. We used thin silicon nitride core and co-planar electrodes to enable the modulator a low driving voltage.

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M3 - Conference contribution

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T3 - MOC 2015 - Technical Digest of 20th Microoptics Conference

BT - MOC 2015 - Technical Digest of 20th Microoptics Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th Microoptics Conference, MOC 2015

Y2 - 25 October 2015 through 28 October 2015

ER -

Hybrid thin silicon nitride and electro-optic polymer waveguide modulators

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