TY - JOUR
T1 - High temperature annealing and CVD growth of few-layer graphene on bulk AlN and AlN templates
AU - Dagher, R.
AU - Matta, S.
AU - Parret, R.
AU - Paillet, M.
AU - Jouault, B.
AU - Nguyen, L.
AU - Portail, M.
AU - Zielinski, M.
AU - Chassagne, T.
AU - Tanaka, S.
AU - Brault, J.
AU - Cordier, Y.
AU - Michon, A.
N1 - Funding Information:
We would like to thank F. Georgi (CEMEF-Mines Paristech) for the use of XPS facilities. We would also like to thank Sophie Bouchoule of the CNRS LPN for providing us the bulk AlN substrate. This work is partly supported by the technology facility network RENATECH, the French National Research Agency under the “Investissements d'Avenir” (ANR-11-LABX-0014), the project “NANOGANUV” (ANR-14-CE26-0025-01), and the FLAG-ERA JTC 2015 project GraNitE.
Publisher Copyright:
© 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
PY - 2017/4/1
Y1 - 2017/4/1
N2 - Graphene and AlN are promising materials, interesting to combine together. In this study, we will present first results for direct growth of graphene on bulk AlN and on AlN templates using chemical vapor deposition, including the annealing of these substrates at high temperatures. Atomic force microscopy (AFM) enabled us to study the evolution of the AlN surface morphology after annealing and growth. Few-layer graphene deposition is demonstrated on the basis of X-ray photoemission and Raman spectroscopy. AFM view of graphene wrinkles on the N-face of bulk AlN.
AB - Graphene and AlN are promising materials, interesting to combine together. In this study, we will present first results for direct growth of graphene on bulk AlN and on AlN templates using chemical vapor deposition, including the annealing of these substrates at high temperatures. Atomic force microscopy (AFM) enabled us to study the evolution of the AlN surface morphology after annealing and growth. Few-layer graphene deposition is demonstrated on the basis of X-ray photoemission and Raman spectroscopy. AFM view of graphene wrinkles on the N-face of bulk AlN.
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U2 - 10.1002/pssa.201600436
DO - 10.1002/pssa.201600436
M3 - Article
AN - SCOPUS:85017166720
SN - 1862-6300
VL - 214
JO - Physica Status Solidi (A) Applications and Materials Science
JF - Physica Status Solidi (A) Applications and Materials Science
IS - 4
M1 - 1600436
ER -