High Sn-concentration (~ 8%) GeSn by low-temperature (~ 150 °c) solid-phase epitaxy of a-GeSn/c-Ge

Taizoh Sadoh, Akira Ooato, Jong Hyeok Park, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


GeSn with a high substitutional Sn concentration (> 7%) is an attractive direct band gap material for high-efficiency photodevices that can be merged with large-scale integrated circuits (LSIs). To achieve GeSn with high Sn concentration, low-temperature solid-phase epitaxy using amorphous-GeSn (a-GeSn) (Sn concentration: 10%-36%)/crystal-Ge (c-Ge) stacked structures was investigated. Solid-phase growth of GeSn was enhanced as Sn concentration was increased, which enabled epitaxial growth at very low temperature (150-200 °C). Interestingly, concentrations of substitutional Sn increased with decreasing growth temperature. As a result, epitaxial growth of GeSn with substitutional Sn concentrations of ~ 8% was achieved by decreasing the growth temperature to 150 °C using a-GeSn (Sn concentration: 36%)/c-Ge stacked structures. This technique is expected to be useful to realize multi-function LSIs, where high-efficiency photodevices are integrated with transistors.

Original languageEnglish
Pages (from-to)20-23
Number of pages4
JournalThin Solid Films
Publication statusPublished - Mar 1 2016

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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