High n-type Sb dopant activation in Ge-rich poly-Ge1-xSnx layers on SiO2 using pulsed laser annealing in flowing water
- Kouta Takahashi
- , Masashi Kurosawa
- , Hiroshi Ikenoue
- , Mitsuo Sakashita
- , Osamu Nakatsuka
- , Shigeaki Zaima
Research output: Contribution to journal › Article › peer-review
20
Link opens in a new tab
Citations
(Scopus)