High frequency electrical circuits on a planar lightwave circuit platform

S. Mino, T. Ohyama, T. Hashimoto, Y. Akahori, K. Yoshino, Y. Yamada, K. Kato, M. Yasu, K. Moriwaki

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


We investigated the propagation losses and the characteristic impedances ZL of coplanar waveguides (CPW's) and microstrip lines (MSL's) on a planar lightwave circuit (PLC)-platform formed on a silica /silicon substrate. The loss of the CPW's was 2.7 dB/cm at 10 GHz on the PLC-platform with 30 μm thick silica layer. Thus, a cm-order circuit of this CPW is difficult to fabricate in the 10 Gb/s module. This is because the silicon substrate has a large loss tangent (tan δ). On the other hand, the loss of the MSL's, where a ground plane shielded the high loss silicon substrate, could be improved to 0.9 dB/cm at 10 GHz with 30 μm thick polyimide. These lower loss MSL's on a PLC-platform can be applied to module operation at 10 Gb/s. Furthermore they have the advantage that they are suitable for application to array device circuits or circuits in a module where several devices are integrated because unlike CPW's the ground planes are not divided by signal lines or DC bias lines. The structure of CPW's and MSL's on a PLC-platform with ZL of 50 Ω was also studied in detail.

Original languageEnglish
Pages (from-to)806-810
Number of pages5
JournalJournal of Lightwave Technology
Issue number5
Publication statusPublished - May 1996
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics


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