Abstract
A high-breakdown voltage AlGaN/GaN MIS-HFET with extreme low leakage current was fabricated for power electronics applications. The fabricated device realized the high breakdown voltage of 550 V with the field plate structure and achieved dramatic reduction of the leakage current to 20 nA/mm due to the MIS gate structure. The leakage current of the MIS-HFET is three orders of magnitude lower than that of the AlGaN/GaN HFET without MIS structure.
Original language | English |
---|---|
Pages (from-to) | 2647-2650 |
Number of pages | 4 |
Journal | Physica Status Solidi C: Conferences |
Volume | 2 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2005 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics