Growth of high-quality ErBa2Cu3O7-δ thin films

T. Ohazama, M. Mukaida, A. Ichinose, K. Matsumoto, Y. Yoshida, S. Horii, A. Saito, S. Ohshima

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14 Citations (Scopus)


ErBa2Cu3O7-δ thin films are grown by pulsed laser deposition (PLD). Using a SrTiO3 as a lattice matched substrate. In the film growth, the substrate temperature is varied from 720 to 780 °C. From X-ray diffraction (XRD) patterns, only the 00l reflections from the ErBa2Cu3O7-δ films are observed. The average of the c-axis length of the other films is 11.6875 Å. ErBa 2Cu3O7-δ film grown at 735 °C is excellent in the crystallinity, while the intensity of 00l peaks of the film grown at more than 780 °C obviously weakened. The zero resistance T c is 90.5 K. Superconducting transition width is 1.5 K. Large and flat grains are observed by atomic force microscopy (AFM) at the surface of the film. From the scanning electron microscope (SEM) image, we confirmed some grains with the size of approximately 200 nm in diameter on the ErBa 2Cu3O7-δ thin film. We observe the interface of ErBa2Cu3O7-δ and substrate clearly by transmission electron microscopy (TEM) measurements.

Original languageEnglish
Pages (from-to)1301-1305
Number of pages5
JournalPhysica C: Superconductivity and its applications
Issue numberSPEC. ISS.
Publication statusPublished - Oct 2004
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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