Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF 4 plasmas

Kenji Furuya; Shinobu Yukita; Hiroshi Okumura; Akira Harata

doi:10.1246/cl.2005.224

Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF ₄ plasmas

Kenji Furuya, Shinobu Yukita, Hiroshi Okumura, Akira Harata

Division for Experimental Natural Science

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

The growth of gaseous neutral species and positive ions was investigated in the downstream region of Ar/CF₄ plasmas by mass spectrometry. As a result, there were several series of C_nF_2n+1⁺ (n = 1-7), C_nF_2n-1⁺ (n = 3-8) and C _nF_2n-3⁺ (n = 4-9) for the positive ions and C_nF_2n+2 (n = 2-7) and C_nF_2n (n = 4-8) for the neutral species. The intensity dependence of the positive ions on the partial pressure of CF₄ was quite different from that of the neutral species, demonstrating that their growth mechanisms are independent of each other.

Original language	English
Pages (from-to)	224-225
Number of pages	2
Journal	Chemistry Letters
Volume	34
Issue number	2
DOIs	https://doi.org/10.1246/cl.2005.224
Publication status	Published - Feb 5 2005

All Science Journal Classification (ASJC) codes

Chemistry(all)

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10.1246/cl.2005.224

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abstract = "The growth of gaseous neutral species and positive ions was investigated in the downstream region of Ar/CF4 plasmas by mass spectrometry. As a result, there were several series of CnF2n+1+ (n = 1-7), CnF2n-1+ (n = 3-8) and C nF2n-3+ (n = 4-9) for the positive ions and CnF2n+2 (n = 2-7) and CnF2n (n = 4-8) for the neutral species. The intensity dependence of the positive ions on the partial pressure of CF4 was quite different from that of the neutral species, demonstrating that their growth mechanisms are independent of each other.",

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AU - Furuya, Kenji

AU - Yukita, Shinobu

AU - Okumura, Hiroshi

AU - Harata, Akira

PY - 2005/2/5

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AB - The growth of gaseous neutral species and positive ions was investigated in the downstream region of Ar/CF4 plasmas by mass spectrometry. As a result, there were several series of CnF2n+1+ (n = 1-7), CnF2n-1+ (n = 3-8) and C nF2n-3+ (n = 4-9) for the positive ions and CnF2n+2 (n = 2-7) and CnF2n (n = 4-8) for the neutral species. The intensity dependence of the positive ions on the partial pressure of CF4 was quite different from that of the neutral species, demonstrating that their growth mechanisms are independent of each other.

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Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF ₄ plasmas

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