Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target

T. Yoshitake, T. Nishiyama, K. Nagayama

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)

    Abstract

    Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.

    Original languageEnglish
    Pages (from-to)489-490
    Number of pages2
    JournalJournal of Materials Science Letters
    Volume19
    Issue number6
    DOIs
    Publication statusPublished - 2000

    All Science Journal Classification (ASJC) codes

    • General Materials Science

    Fingerprint

    Dive into the research topics of 'Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target'. Together they form a unique fingerprint.

    Cite this