Formation of mesoscopic polymer dots by rubbing transfer

M. Sano; J. Okamura; S. Shinkai

doi:10.1557/proc-576-155

Formation of mesoscopic polymer dots by rubbing transfer

M. Sano, J. Okamura, S. Shinkai

Research output: Contribution to journal › Conference article › peer-review

Abstract

Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.

Original language	English
Pages (from-to)	155-158
Number of pages	4
Journal	Materials Research Society Symposium - Proceedings
Volume	576
DOIs	https://doi.org/10.1557/proc-576-155
Publication status	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 MRS Spring Meeting - Symposium DD, 'Organic/Inorganic Hybrid Materials' - San Francisco, CA, USA Duration: Apr 5 1999 → Apr 9 1999

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Formation of mesoscopic polymer dots by rubbing transfer",

abstract = "Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.",

author = "M. Sano and J. Okamura and S. Shinkai",

year = "1999",

doi = "10.1557/proc-576-155",

language = "English",

volume = "576",

pages = "155--158",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1999 MRS Spring Meeting - Symposium DD, 'Organic/Inorganic Hybrid Materials' ; Conference date: 05-04-1999 Through 09-04-1999",

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T1 - Formation of mesoscopic polymer dots by rubbing transfer

AU - Sano, M.

AU - Okamura, J.

AU - Shinkai, S.

PY - 1999

Y1 - 1999

N2 - Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.

AB - Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.

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U2 - 10.1557/proc-576-155

DO - 10.1557/proc-576-155

M3 - Conference article

AN - SCOPUS:0033342314

SN - 0272-9172

VL - 576

SP - 155

EP - 158

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1999 MRS Spring Meeting - Symposium DD, 'Organic/Inorganic Hybrid Materials'

Y2 - 5 April 1999 through 9 April 1999

ER -

Formation of mesoscopic polymer dots by rubbing transfer

Abstract

All Science Journal Classification (ASJC) codes

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