Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)


Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.

Original languageEnglish
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
Publication statusPublished - Dec 26 2018
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: Oct 28 2018Oct 31 2018

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Other17th IEEE SENSORS Conference, SENSORS 2018
CityNew Delhi

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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