Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process

Fumihiro Sassa; Kenshi Hayashi

doi:10.1109/ICSENS.2018.8589717

Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process

Fumihiro Sassa, Kenshi Hayashi

Electronic Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.

Original language	English
Title of host publication	2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538647073
DOIs	https://doi.org/10.1109/ICSENS.2018.8589717
Publication status	Published - Dec 26 2018
Event	17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India Duration: Oct 28 2018 → Oct 31 2018

Publication series

Name	Proceedings of IEEE Sensors
Volume	2018-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Other

Other	17th IEEE SENSORS Conference, SENSORS 2018
Country/Territory	India
City	New Delhi
Period	10/28/18 → 10/31/18

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2018.8589717

Cite this

Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process. / Sassa, Fumihiro ; Hayashi, Kenshi.
2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. 8589717 (Proceedings of IEEE Sensors; Vol. 2018-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sassa, F & Hayashi, K 2018, Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process. in 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings., 8589717, Proceedings of IEEE Sensors, vol. 2018-October, Institute of Electrical and Electronics Engineers Inc., 17th IEEE SENSORS Conference, SENSORS 2018, New Delhi, India, 10/28/18. https://doi.org/10.1109/ICSENS.2018.8589717

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abstract = "Patternable actuator film for monolithic soft micro robot process was developed. The film is consisted from thermal bimorph actuation layer and extra functional layer including driving heater layer and elastic mechanical buffer layer. A cantilever arm actuator fabricated by patterning the film was operated with 2 V applied voltage. Multi actuator device or micro robot can be fabricated without assembling process by appropriate patterning process with this film.",

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Flexible Thermal Actuator Film for Monolithic Soft Micro Robot Process

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