First X-ray imaging with a micromachined Wolter type-I telescope

Tomohiro Ogawa, Yuichiro Ezoe, Takuya Kakiuchi, Masahiro Ikuta, Mayu Sato, Kasumi Nakamura, Masaki Numazawa, Kazuma Takeuchi, Masaru Terada, Takaya Ohashi, Ikuyuki Mitsuishi, Kumi Ishikawa, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-Kα line at 1.49 keV. High angular and positional accuracies of the order of arcsec and μ m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm2 which is ∼ 5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.

Original languageEnglish
Pages (from-to)1101-1116
Number of pages16
JournalMicrosystem Technologies
Issue number4
Publication statusPublished - Apr 1 2017
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


Dive into the research topics of 'First X-ray imaging with a micromachined Wolter type-I telescope'. Together they form a unique fingerprint.

Cite this