TY - GEN
T1 - Field effect transistor type CO2 sensor attached with metal carbonate auxiliary phase
AU - Shimanoe, K.
AU - Goto, K.
AU - Obata, K.
AU - Nakata, S.
AU - Sakai, G.
AU - Yamazoe, N.
N1 - Publisher Copyright:
© 2003 IEEE.
PY - 2003
Y1 - 2003
N2 - FET type CO2 sensor operative at room temperature was developed by combining with a metal carbonate auxiliary phase and metal oxide sensing electrode. In an attempt to lower the operating temperature and reduce the humidity dependence, the structure with Li2CO3-BaCO3(1:3)-ITO/Na+ exchange membrane/FET was fabricated. The resulting device exhibited fairly excellent CO2 sensing characteristics at room temperature (30°C), although the other devices failed to work at room temperature or suffered disturbance by humidity seriously. The V/sub GS/ for the best device obtained was linear to the logarithm of the CO2 concentration, with its slopes indicating n=2.0 of theoretical value where n is the number of reaction electrons involved in the electrochemical reduction per CO2. The times for 90% response and 90% recovery to switching-on and-off 3000 ppm CO2 were 1 and 2 min, respectively, and all of the response transients reproduced very well in the successive runs.
AB - FET type CO2 sensor operative at room temperature was developed by combining with a metal carbonate auxiliary phase and metal oxide sensing electrode. In an attempt to lower the operating temperature and reduce the humidity dependence, the structure with Li2CO3-BaCO3(1:3)-ITO/Na+ exchange membrane/FET was fabricated. The resulting device exhibited fairly excellent CO2 sensing characteristics at room temperature (30°C), although the other devices failed to work at room temperature or suffered disturbance by humidity seriously. The V/sub GS/ for the best device obtained was linear to the logarithm of the CO2 concentration, with its slopes indicating n=2.0 of theoretical value where n is the number of reaction electrons involved in the electrochemical reduction per CO2. The times for 90% response and 90% recovery to switching-on and-off 3000 ppm CO2 were 1 and 2 min, respectively, and all of the response transients reproduced very well in the successive runs.
UR - http://www.scopus.com/inward/record.url?scp=84944718935&partnerID=8YFLogxK
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U2 - 10.1109/SENSOR.2003.1215254
DO - 10.1109/SENSOR.2003.1215254
M3 - Conference contribution
AN - SCOPUS:84944718935
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 65
EP - 68
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Y2 - 8 June 2003 through 12 June 2003
ER -