Fabrication of YBCO film by TFA-MOD process at low-pressure atmosphere

Ryo Teranishi, Tetsuji Honjo, Yoshitaka Tokunaga, Hiroshi Fuji, Junko Matsuda, Teruo Izumi, Akimasa Yajima, Yuh Shiohara

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


Influence of the process conditions, including the water partial pressure and the total annealing pressure, on YBa2Cu3O 7-y (YBCO) film growth has been investigated in order to increase the growth rate. YBCO films have been fabricated on SrTiO3 substrate by metal-organic deposition using trifluoroacetates (TFA) as a solute source under the low-pressure atmosphere. It was observed that the growth rate of the YBCO film was in proportion to the square root of the water partial pressure and was in inverse proportion to the total pressure. A higher YBCO growth rate was achieved about 3 times as fast as that under the atmospheric fabrication conditions with maintaining the high Jc performance. On the other hand, the volume fraction of a-axis oriented grains in the YBCO film was strongly dependent on the growth rate, a-axis oriented YBCO grains were clearly recognized in the films grown with either very low or very high growth rate. As a result, it was found that the growth region should be controlled to prevent from the growth of the a-axis oriented grains.

Original languageEnglish
Pages (from-to)920-925
Number of pages6
JournalPhysica C: Superconductivity and its applications
Issue numberSPEC. ISS.
Publication statusPublished - Oct 2004
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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