@inbook{a05bd3e6c12d4cb9b6716ca15d610ccd,
title = "Fabrication of single-crystal Si microstructures by anodization",
abstract = "We have investigated the application of the anodization process to the fabrication of microstructures consisting of single-crystal Si. When anodization is carried out in the dark, porous Si is preferentially formed in a p-type region. The porous region can be used as a sacrificial region. The unanodized Si region forms the components of the microstructures. The shape of the porous region can be controlled by varying the profiles of the n- and p-type regions and their resistivity. It has been found that, by utilizing these characteristics, various microstructures can be formed from single-crystal Si. Fabrication of a cantilever and a piezoresistive gauge for a pressure sensor are demonstrated.",
author = "Katsuya Higa and Tanemasa Asano",
year = "1996",
month = dec,
language = "English",
series = "Japanese Journal of Applied Physics, Part 1: Regular Papers \& Short Notes \& Review Papers",
number = "12 B",
pages = "6347--6695",
editor = "Y. Aoyagi and N. Atoda and T. Fukui and M. Komuro and M. Kotera and \{et al\}, al",
booktitle = "Japanese Journal of Applied Physics, Part 1: Regular Papers \& Short Notes \& Review Papers",
edition = "12 B",
note = "Proceedings of the 1996 9th International MicroProcess Conference, MPC'96 ; Conference date: 08-07-1996 Through 11-07-1996",
}