FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

Nobumitsu Hirose; Yuuichi Harada; Shigeru Yoshimori; Mitsuo Kawamura

FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

Nobumitsu Hirose, Yuuichi Harada, Shigeru Yoshimori, Mitsuo Kawamura

Research output: Contribution to journal › Conference article › peer-review

Abstract

We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.

Original language	English
Pages (from-to)	425-426
Number of pages	2
Journal	Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E
Volume	E69
Issue number	4
Publication status	Published - Apr 1 1986
Externally published	Yes
Event	Pap from 1986 Natl Conv IECE Jpn - Niigata, Jpn Duration: Mar 23 1986 → Mar 26 1986

All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

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title = "FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.",

abstract = "We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.",

author = "Nobumitsu Hirose and Yuuichi Harada and Shigeru Yoshimori and Mitsuo Kawamura",

year = "1986",

month = apr,

day = "1",

language = "English",

volume = "E69",

pages = "425--426",

journal = "Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E",

issn = "0387-236X",

number = "4",

note = "Pap from 1986 Natl Conv IECE Jpn ; Conference date: 23-03-1986 Through 26-03-1986",

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TY - JOUR

T1 - FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

AU - Hirose, Nobumitsu

AU - Harada, Yuuichi

AU - Yoshimori, Shigeru

AU - Kawamura, Mitsuo

PY - 1986/4/1

Y1 - 1986/4/1

N2 - We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.

AB - We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.

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M3 - Conference article

AN - SCOPUS:0022705720

SN - 0387-236X

VL - E69

SP - 425

EP - 426

JO - Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E

JF - Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E

IS - 4

T2 - Pap from 1986 Natl Conv IECE Jpn

Y2 - 23 March 1986 through 26 March 1986

ER -

FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

Abstract

All Science Journal Classification (ASJC) codes

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