Fabrication of on-chip microcapillary using photosensitive glass

S. Etoh, T. Fujimura, R. Hattori, Y. Kuroki

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The on-chip microcapillary applying for electrophoresis analysis device has been fabricated on photosensitive glass. This process can make a high aspect-ratio channel structure. The channel-depth can be controlled by varying wet-etching time without widening the channel width because the substrate material has vertical high etch rate selectivity. This high aspect-ratio structure obtains a long optical path and appropriate sample volume resulting in high-sensitivity for various analyses. The fabrication process is simpler than a usual glass micromachining process because of photo-resistless lithography process. In order to smooth the channel surface and to attach a cover glass onto the substrate, a polysilazane coating process is proposed and revealed to be effective.

Original languageEnglish
Pages (from-to)541-545
Number of pages5
JournalMicrosystem Technologies
Issue number8
Publication statusPublished - Oct 1 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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