Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

T. Arakawa, H. Kudo, H. Sato, H. Kobayashi, T. Izumi, S. Ohtsuka, K. Mori, S. Shoji, T. Osaka, T. Homma, K. Mitsuda, N. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, K. YoshidaY. Ishisaki, U. Morita, T. Koga, K. Shinozaki, K. Sato, N. Takai, T. Ohashi, Y. Kuroda, M. Onishi, M. Goto, F. Beppu

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

Original languageEnglish
Pages (from-to)456-459
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number1-3
Publication statusPublished - Mar 11 2004
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation


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