Fabrication of microcantilever with a silicon tip prepared by anodization

Katsuya Higa, Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The fabrication process of a microcantilever with a silicon tip prepared by anodization for an atomic force microscope(AFM) is demonstrated. The silicon tip having a high aspect ratio can be prepared using preferential anodization of a silicon wafer with n / p junction. The microcantilever is fabricated by patterning a silicon nitride film deposited on the anodized wafer. The silicon tip is examined by observing the surface morphology of an anisotropically etched silicon step and the grains of a vacuum evaporated Au film.

Original languageEnglish
Pages (from-to)7078-7080
Number of pages3
JournalJapanese Journal of Applied Physics
Volume37
Issue number12 B
DOIs
Publication statusPublished - 1998

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

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