Fabrication of micro IC probe for LSI testing

Ito Takahiro, Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalConference articlepeer-review

20 Citations (Scopus)


A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.

Original languageEnglish
Pages (from-to)126-131
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - Mar 10 2000
Externally publishedYes
Event12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA
Duration: Jan 17 1999Jan 21 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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