Fabrication of Micro-Cantilever with A Silicon Probe Prepared by Anodization

K. Higa, T. Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 1998
Subtitle of host publication1998 International Microprocesses and Nanotechnology Conference
EditorsHyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages178-179
Number of pages2
ISBN (Electronic)4930813832, 9784930813831
DOIs
Publication statusPublished - 1998
Event1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of
Duration: Jul 13 1998Jul 16 1998

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
Volume1998-July

Other

Other1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Country/TerritoryKorea, Republic of
CityKyoungju
Period7/13/987/16/98

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Nuclear and High Energy Physics
  • Computer Science Applications

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