Fabrication of CO2 sensor using NASICON thick film

Yuji Miyachi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe

Research output: Contribution to journalConference articlepeer-review

34 Citations (Scopus)


The condition of screen-printing paste was explored to densify a thick film of Na+ conductor, Na3Zr2Si2PO12 (NASICON) deposited on an alumina substrate. A fair well-densified NASICON thick film was found to be obtained from a paste consisting of NASICON powder and ethylene glycol dispersant by screen-printing and calcination at 1000 °C. The resulting planar sensor showed good CO2 sensing capability even under humid conditions, although the emf tended to shift upward with increasing relative humidity. In order to reduce the disturbance by humidity, applicability of an oxide-ionic conductor of Bi2Me0.1V0.9O5.35 as a counter electrode material was examined. The oxide-incorporated devices, of both disk type and planar, exhibited stable CO2 sensing properties under dry as well as humid conditions. In addition, the dependence of emf on RH could be reduced considerably with the oxide-incorporated devices. It was found, however, that the RH dependence of emf originates from both of the sensing and counter electrodes so that the RH dependence of both electrodes should be tackled with to eliminate the RH dependence of the devices.

Original languageEnglish
Pages (from-to)250-256
Number of pages7
JournalSensors and Actuators, B: Chemical
Issue number1-3
Publication statusPublished - Aug 1 2003
EventProceedings of the Ninth International Meeting on Chemical Engineering - Boston, MA, United States
Duration: Jul 7 2003Jul 10 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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