TY - JOUR
T1 - Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application
AU - Ariffin, Nur Hamizah Zainal
AU - Yahaya, Hafizal
AU - Shinano, Shunji
AU - Tanaka, Satoru
AU - Hashim, Abdul Manaf
N1 - Funding Information:
NHZA thanks Malaysia-Japan International Institute of Technology for the scholarship. This work was funded by Research Laboratory for High Voltage Electron Microscopy of Kyushu University , Malaysia-Japan International Institute of Technology , Universiti Teknologi Malaysia , Malaysia Ministry of Education and Malaysia Ministry of Science, Technology and Innovation .
Publisher Copyright:
© 2014 Elsevier B.V. All rights reserved.
PY - 2015/5/2
Y1 - 2015/5/2
N2 - We report the fabrication of conical shape micropore structures on silicon nitride/silicon (Si3N4/Si) substrate to function as a fluidic channel as well as a supporting structure for sensing membrane. Excellent shape of conical structure with large diameter of top hole size and small diameter of bottom hole size (1-2 μm) was successfully fabricated by utilizing a combination of grinding process, fine polishing and multistep focused ion beam (FIB) milling. A so-called re-deposition phenomena seems to be unavoidable in the multistep FIB milling resulted to the formation of tip-like structure at every milling step. Low surface roughness is effective in improving the shape of circumference of the milling area. The possibility to integrate such conical shape structure with graphene was also demonstrated. This result opens up the breakthrough towards new generation of analytical platform for biosensor application.
AB - We report the fabrication of conical shape micropore structures on silicon nitride/silicon (Si3N4/Si) substrate to function as a fluidic channel as well as a supporting structure for sensing membrane. Excellent shape of conical structure with large diameter of top hole size and small diameter of bottom hole size (1-2 μm) was successfully fabricated by utilizing a combination of grinding process, fine polishing and multistep focused ion beam (FIB) milling. A so-called re-deposition phenomena seems to be unavoidable in the multistep FIB milling resulted to the formation of tip-like structure at every milling step. Low surface roughness is effective in improving the shape of circumference of the milling area. The possibility to integrate such conical shape structure with graphene was also demonstrated. This result opens up the breakthrough towards new generation of analytical platform for biosensor application.
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U2 - 10.1016/j.mee.2014.11.011
DO - 10.1016/j.mee.2014.11.011
M3 - Article
AN - SCOPUS:84918791638
SN - 0167-9317
VL - 133
SP - 1
EP - 5
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -