TY - GEN
T1 - Fabrication of carbon-based field emitters using a stamp technology
AU - Baba, Akiyoshi
AU - Hizukuri, Masafumi
AU - Iwamoto, Masakazu
AU - Asano, Tanemasa
PY - 1999/1/1
Y1 - 1999/1/1
N2 - We proposed and demonstrated stamp technology, a new and simple method for fabricating carbon-based (photoresist and polyimide) field emitters. It is possible to completely transfer the shape of the mold to emitter materials. In spite of the fact that the emitter is prepared in the wedge shape, emission current up to μA was obtained. This new technology is very attractive for large-area devices, since large-area stamping is easily done by using the step and repeat technique.
AB - We proposed and demonstrated stamp technology, a new and simple method for fabricating carbon-based (photoresist and polyimide) field emitters. It is possible to completely transfer the shape of the mold to emitter materials. In spite of the fact that the emitter is prepared in the wedge shape, emission current up to μA was obtained. This new technology is very attractive for large-area devices, since large-area stamping is easily done by using the step and repeat technique.
UR - http://www.scopus.com/inward/record.url?scp=84943567370&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84943567370&partnerID=8YFLogxK
U2 - 10.1109/IMNC.1999.797537
DO - 10.1109/IMNC.1999.797537
M3 - Conference contribution
AN - SCOPUS:84943567370
T3 - 1999 International Microprocesses and Nanotechnology Conference
SP - 182
EP - 183
BT - 1999 International Microprocesses and Nanotechnology Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1999 International Microprocesses and Nanotechnology Conference
Y2 - 6 July 1999 through 8 July 1999
ER -