Fabrication of bistable prestressed curved-beam

Ivransa Z. Pane; Tanemasa Asano

doi:10.1109/IMNC.2007.4456268

Fabrication of bistable prestressed curved-beam

Ivransa Z. Pane, Tanemasa Asano

Integrated Electronic Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

We have shown that prestressed curved-beam of single crystal Si can be fabricated through the sequences of the standard CMOS process using SOI. The theoritical analysis procedure for the bistable operation was established. Miniaturized bistable curved-beam will be applied to memory devices.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	390-391
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456268
Publication status	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: Nov 5 2007 → Nov 8 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	11/5/07 → 11/8/07

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456268

Cite this

Pane, I. Z., & Asano, T. (2007). Fabrication of bistable prestressed curved-beam. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 390-391). Article 4456268 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456268

Fabrication of bistable prestressed curved-beam. / Pane, Ivransa Z.; Asano, Tanemasa.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 390-391 4456268 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Pane, IZ & Asano, T 2007, Fabrication of bistable prestressed curved-beam. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456268, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 390-391, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 11/5/07. https://doi.org/10.1109/IMNC.2007.4456268

Pane IZ, Asano T. Fabrication of bistable prestressed curved-beam. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 390-391. 4456268. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456268

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author = "Pane, {Ivransa Z.} and Tanemasa Asano",

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ER -

Fabrication of bistable prestressed curved-beam

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All Science Journal Classification (ASJC) codes

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