This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.
|Publication status||Published - 2015|
|Event||21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic|
Duration: Aug 30 2015 → Sept 4 2015
|Other||21st IMEKO World Congress on Measurement in Research and Industry|
|Period||8/30/15 → 9/4/15|
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering