Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Hiroshi Murakami; Akio Katsuki; Takao Sajima; Mitsuyoshi Fukuda; Masaki Okada; Megumu Nagaura

Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura

Manufacturing Process

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

Original language	English
Publication status	Published - 2015
Event	21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic Duration: Aug 30 2015 → Sept 4 2015

Other

Other	21st IMEKO World Congress on Measurement in Research and Industry
Country/Territory	Czech Republic
City	Prague
Period	8/30/15 → 9/4/15

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

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title = "Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology",

abstract = "This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.",

author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima and Mitsuyoshi Fukuda and Masaki Okada and Megumu Nagaura",

year = "2015",

language = "English",

note = "21st IMEKO World Congress on Measurement in Research and Industry ; Conference date: 30-08-2015 Through 04-09-2015",

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TY - CONF

T1 - Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Sajima, Takao

AU - Fukuda, Mitsuyoshi

AU - Okada, Masaki

AU - Nagaura, Megumu

PY - 2015

Y1 - 2015

N2 - This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

AB - This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

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UR - http://www.scopus.com/inward/citedby.url?scp=84951104819&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84951104819

T2 - 21st IMEKO World Congress on Measurement in Research and Industry

Y2 - 30 August 2015 through 4 September 2015

ER -

Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Abstract

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All Science Journal Classification (ASJC) codes

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