Fabrication of advanced integrated optical micro-encoder chip

R. Sawada, O. Ohguchi, K. Mise, M. Tsubamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Pages337-342
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: Jan 25 1994Jan 28 1994

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period1/25/941/28/94

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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