Fabrication of active integrated optical micro-encoder

R. Sawada, H. Tanaka, O. Ohguchi, J. Shimada, S. Hara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Citations (Scopus)


A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 μm is possible. The encoder is extremely small, only 500-μm square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.

Original languageEnglish
Title of host publicationProceedings. IEEE Micro Electro Mechanical Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)0879426411
Publication statusPublished - 1991
Externally publishedYes
EventProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn
Duration: Jan 30 1991Feb 2 1991

Publication series

NameProceedings. IEEE Micro Electro Mechanical Systems


OtherProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
CityNara, Jpn

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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