TY - GEN
T1 - Fabrication of active integrated optical micro-encoder
AU - Sawada, R.
AU - Tanaka, H.
AU - Ohguchi, O.
AU - Shimada, J.
AU - Hara, S.
PY - 1991
Y1 - 1991
N2 - A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 μm is possible. The encoder is extremely small, only 500-μm square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.
AB - A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 μm is possible. The encoder is extremely small, only 500-μm square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.
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M3 - Conference contribution
AN - SCOPUS:0025808461
SN - 0879426411
T3 - Proceedings. IEEE Micro Electro Mechanical Systems
SP - 233
EP - 238
BT - Proceedings. IEEE Micro Electro Mechanical Systems
PB - Publ by IEEE
T2 - Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
Y2 - 30 January 1991 through 2 February 1991
ER -